- wafer-stepping lithography
- литография на пластинах
English-Russian dictionary of electronics. 2015.
English-Russian dictionary of electronics. 2015.
Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… … Wikipedia